Thanks to its excellent high-temperature resistance, chemical inertness, and low volatility, fluorosilicone oil has become an indispensable key material in semiconductor manufacturing equipment. It is widely used in core processes such as wafer fabrication, cleaning and etching, and packaging and testing, effectively solving lubrication, sealing, and pollution control problems in high-purity environments.

I. Key Applications in Wafer Manufacturing Equipment
1. Lubrication and Sealing in High Vacuum Systems
In high vacuum environments below 10⁻⁸ Pa, fluorosilicone grease exhibits extremely low volatile loss, ensuring long-term stable operation of the system, making it an ideal choice for semiconductor wafer manufacturing equipment.
As a vacuum pump lubricant, it is suitable for handling reactive gas media, especially for precision vacuum systems requiring long-term stable operation.
The low surface tension and chemical stability of fluorosilicone oil make it an ideal lubricant for seals and valves in high vacuum systems, preventing leakage under extreme conditions.
2. Film-forming Agent in Photolithography Processes
Fluorosilicone oil acts as a film-forming agent in photolithography processes, forming a uniform thin film under high-temperature conditions, ensuring the quality and imaging effect of the photoresist.
Its low refractive index (1.37-1.38) helps reduce light scattering and improve photolithography accuracy, making it particularly suitable for deep ultraviolet (DUV) and extreme ultraviolet (EUV) photolithography processes.

II. Core Applications in Cleaning and Etching Processes
1. Wafer Cleaning Solution
Fluorosilicic acid is used for wafer cleaning, surface treatment, and coating deposition. Its strong acidity effectively removes metal impurities, while fluoride ions react with the silicon substrate to form a stable fluorosilicate layer.
The fluorine-containing cleaning solution, HEXAFLUO series, replaces traditional solvents in semiconductor etching processes, significantly improving cleaning efficiency and reducing environmental pollution.
2. Protective Layer in Etching Processes
Fluorosilicone oil forms a temporary protective layer during the etching process, preventing over-etching of non-target areas and improving etching accuracy and uniformity.
Its resistance to strong acids, strong bases, and various organic solvents allows fluorosilicone oil to remain stable in harsh etching environments without being decomposed by the etching solution or contaminating the wafer surface. III. Key Applications in Packaging and Testing Equipment
1. Semiconductor Packaging Materials
Fluorosilicone materials exhibit a low dielectric constant of 2.8-3.2 in semiconductor packaging, reducing signal loss by 58% in the 10GHz frequency band, significantly improving high-frequency signal transmission performance.
As a packaging adhesive and encapsulating layer material, fluorosilicone oil can reduce the thermal expansion coefficient of the packaging layer, improve packaging reliability, and maintain excellent electrical insulation properties.
2. Lubrication of Test Probes and Connectors
Fluorosilicone grease is used as a lubricant for test probes and connectors, ensuring good contact during high-frequency testing and reducing signal interference.
Its volume resistivity of ≥1×10¹⁵Ω·cm ensures that no additional electrical noise is introduced during high-precision testing.