In semiconductor wafer manufacturing equipment, phenyl silicone oil is usually not used as a core corrosion-resistant material that directly contacts plasma. Its plasma corrosion resistance is weak. Practical application needs to be combined with equipment structure and protection design. The following is a specific analysis:

1. Basic characteristics of phenyl silicone oil
Phenyl silicone oil is an organic silicon compound with excellent high and low temperature resistance, electrical insulation performance and chemical stability. However, during the semiconductor wafer manufacturing process, a high-energy plasma environment will be formed inside the equipment, which places extremely high demands on the plasma corrosion resistance of the material.

2. Consideration of plasma corrosion resistance
Characteristics of plasma environment:
Plasma is an ionized gas composed of electrons, ions and neutral particles with high energy and high reactivity.
In semiconductor wafer manufacturing, plasma is often used in process steps such as etching and deposition, causing serious corrosion and erosion to equipment materials.
Corrosion resistance of phenyl silicone oil:
Although phenyl silicone oil has a certain chemical stability, its molecular structure may be destroyed in a high-energy plasma environment, resulting in performance degradation.
High-energy particles in plasma may trigger a chain reaction of phenyl silicone oil, produce free radicals or other active substances, and further accelerate its degradation process.
Considerations in practical applications:
In semiconductor wafer manufacturing equipment, phenyl silicone oil is usually not used as a core corrosion-resistant material that is directly in contact with plasma.
On the contrary, it may be used for auxiliary functions such as lubrication, sealing or heat conduction of equipment, which have relatively low requirements for the material's plasma corrosion resistance.
Three. Selection of alternative materials
For equipment parts that need to be directly in contact with plasma, materials with higher plasma corrosion resistance are usually selected, such as:

Ceramic materials: such as alumina, silicon nitride, etc., have excellent high temperature resistance, corrosion resistance and plasma erosion resistance.
Metal materials: such as stainless steel, aluminum alloy, etc., improve their plasma corrosion resistance through surface treatment or coating technology.
Polymer composite materials: prepared by special formulas and processes, with excellent plasma corrosion resistance and mechanical properties.