Vacuum diffusion pumps play an important role in semiconductor manufacturing and use specific pump oils to keep them running properly. The following are the applications of vacuum diffusion pump oil in semiconductor manufacturing:

Cleaning: Vacuum diffusion pump oil is often used to clean semiconductor equipment and components. During the manufacturing process, semiconductor equipment requires frequent cleaning to remove impurities, deposits and other contaminants. Vacuum diffusion pumps enable an efficient cleaning process by creating a high vacuum environment that removes gases and impurities from the equipment.

Deposition: During the deposition of semiconductor thin films, vacuum diffusion pump oil is used to exclude and remove gases and impurities in the reaction chamber. Thin film deposition techniques, such as chemical vapor deposition (CVD) and physical vapor deposition (PVD), require high vacuum environments. Vacuum diffusion pumps help maintain a constant vacuum within the reaction chamber by providing high-speed gas diffusion and pumping.

Protection: Vacuum diffusion pump oil is also used to protect moving parts and seals in semiconductor equipment. In vacuum diffusion pumps, the pump oil forms a lubricating film that reduces wear and friction on metal parts, providing longer life and reliability.

Thermal control: In some semiconductor manufacturing processes, the operation of the vacuum diffusion pump will generate a certain amount of heat. The pump oil is used as a cooling medium to absorb and disperse the heat generated during the operation of the pump to ensure the temperature stability and normal operation of the vacuum system.

It is important that the proper vacuum diffusion pump oil is used in semiconductor manufacturing and that it is regularly changed and maintained according to the manufacturer's recommendations and guidelines to ensure efficient and reliable systems.