Vacuum diffusion pump oils usually use different types of oils such as mineral oil, silicone oil or fluorinated polyether oil.

Mineral oil is a traditional diffusion pump oil that is suitable for most diffusion pumps. The advantage of mineral oil is that it is cheap and readily available. But mineral oil is easy to decompose and oxidize at high temperature, and it is also possible to produce deposits and gas pollution.

Silicone oil is a high temperature diffusion pump oil, suitable for high temperature applications. Silicone oil has good stability and high temperature resistance, and can work in high temperature environment. However, the price of silicone oil is high, and there are also disadvantages such as flammability, volatility and poor pump speed.

Fluorinated polyether oil is a high performance diffusion pump oil for demanding vacuum applications. Fluorinated polyether oils have the advantages of excellent chemical stability, low gas content and low volatility, but also have higher prices and lower pump speeds.

In addition to the oils mentioned above, there are other special-purpose diffusion pump oils, such as fluorinated hydrocarbon oil, polytetrafluoroethylene oil, etc., and you can choose the appropriate oil according to the actual application needs.